Granted Patent
Utility
US 6,074,890 · App. 09/004,683
Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices
Inventors:
Jun Yao, Sangtae Park
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Jan 8, 1998
Inventors
Jun Yao
Sangtae Park
Assignee (at issue)
Rockwell Science Center, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.