Granted Patent
Utility
US 6,074,909 · App. 09/127,262
Apparatus and method for forming controlled deep trench top isolation layers
Inventor:
Ulrike Gruening
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Jul 31, 1998
Inventor
Ulrike Gruening
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.