Granted Patent
Utility
US 6,074,921 · App. 08/886,170
Self-aligned processing of semiconductor device features
Inventor:
Xi-Wei Lin
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Jun 30, 1997
Inventor
Xi-Wei Lin
Assignee (at issue)
VLSI Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.