Granted Patent
Utility
US 6,074,941 · App. 09/113,471
Method of forming a via with plasma treatment of SOG
Inventors:
Ching-Hsing Hsieh, William Lu, Chih-Ching Hsu, Yung-Chieh Kuo
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Jul 10, 1998
Inventors
Ching-Hsing Hsieh
William Lu
Chih-Ching Hsu
Yung-Chieh Kuo
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.