Granted Patent
Utility
US 6,074,945 · App. 09/140,878
Methods for preparing ruthenium metal films
Inventors:
Brian A. Vaartstra, Eugene P. Marsh
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Aug 27, 1998
Inventors
Brian A. Vaartstra
Eugene P. Marsh
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.