Granted Patent
Utility
US 6,074,946 · App. 08/794,441
Integrated processing for an etch module using a hard mask technique
Inventors:
Luc Ouellet, Abdellah Azelmad
Patented Case
View Patent ↗
Granted: Jun 13, 2000
Filed: Feb 4, 1997
Inventors
Luc Ouellet
Abdellah Azelmad
Assignee (at issue)
Mitel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.