Granted Patent
Utility
US 6,076,979 · App. 09/121,881
Method of and apparatus for supplying developing solution onto substrate
Inventors:
Masahiro Mimasaka, Akiko Tanaka, Yukihiro Takamura
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Jul 24, 1998
Inventors
Masahiro Mimasaka
Akiko Tanaka
Yukihiro Takamura
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.