Granted Patent
Utility
US 6,077,026 · App. 09/050,321
Programmable substrate support for a substrate positioning system
Inventor:
Richard E. Shultz
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Mar 30, 1998
Inventor
Richard E. Shultz
Assignee (at issue)
Progressive System Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.