Granted Patent
Utility
US 6,077,355 · App. 08/869,887
Apparatus and method for depositing a film on a substrate by chemical vapor deposition
Inventors:
Atsushi Yamashita, Toru Tatsumi
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Jun 5, 1997
Inventors
Atsushi Yamashita
Toru Tatsumi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.