Granted Patent
Utility
US 6,077,417 · App. 09/195,843
Silicon microlens cleaning system
Inventors:
Kim Y. Lee, T. H. Philip Chang, Ho Seob Kim
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Nov 19, 1998
Inventors
Kim Y. Lee
T. H. Philip Chang
Ho Seob Kim
Assignee (at issue)
ETEC SYSTEMS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.