Granted Patent
Utility
US 6,077,449 · App. 08/991,673
Method of checking the accuracy of the result of a multistep etching process
Inventor:
Jörg Hehmann
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Dec 16, 1997
Inventor
Jörg Hehmann
Assignee (at issue)
ALCATEL
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.