Granted Patent
Utility
US 6,078,020 · App. 08/970,146
Apparatus and method for manufacturing semiconductor device
Inventor:
Fuminobu Ono
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Nov 13, 1997
Inventor
Fuminobu Ono
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.