Granted Patent
Utility
US 6,078,030 · App. 09/150,458
Component heater for use in semiconductor manufacturing equipment
Inventor:
Roger A. Moon
Patented Case
View Patent ↗
Granted: Jun 20, 2000
Filed: Sep 9, 1998
Inventor
Roger A. Moon
Assignee (at issue)
Millipore Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.