Granted Patent
Utility
US 6,079,098 · App. 09/179,829
Method and apparatus for processing substrates
Inventors:
Kai Soellner, Stefan Panzer
Patented Case
View Patent ↗
Granted: Jun 27, 2000
Filed: Oct 28, 1998
Inventors
Kai Soellner
Stefan Panzer
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.