Granted Patent
Utility
US 6,079,358 · App. 09/185,829
Apparatus for forming thin film
Inventors:
Dae Won Kim, Sang-Soon Bae
Patented Case
View Patent ↗
Granted: Jun 27, 2000
Filed: Nov 4, 1998
Inventors
Dae Won Kim
Sang-Soon Bae
Assignee (at issue)
SK HOLDINGS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.