IP Library Granted Patent US 6,079,928
Granted Patent Utility
US 6,079,928 · App. 09/084,754

Dual plate gas assisted heater module

Inventors: Victor J. Theriault, Mark Ives
Patented Case View Patent ↗
Granted: Jun 27, 2000 Filed: May 26, 1998
Inventors
Victor J. Theriault
Mark Ives
Assignee (at issue)
Brooks Automation GmbH

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Quick Facts
Patent No.
US 6,079,928
App. No.
09/084,754
Filed
1998-05-26
Granted
2000-06-27
Kind
A