Granted Patent
Utility
US 6,080,522 · App. 09/242,942
Radiation-sensitive resist composition with high heat resistance
Inventors:
Hiromi Ito, Hatsuyuki Tanaka
Patented Case
View Patent ↗
Granted: Jun 27, 2000
Filed: Feb 26, 1999
Inventors
Hiromi Ito
Hatsuyuki Tanaka
Assignee (at issue)
CLARIANT INTERNATIONAL LTD
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.