Granted Patent
Utility
US 6,080,671 · App. 09/136,095
Process of chemical-mechanical polishing and manufacturing an integrated circuit
Inventors:
Annette M. Crevasse, Brian D. Crevasse, William Easter, John A. Maze
Patented Case
View Patent ↗
Granted: Jun 27, 2000
Filed: Aug 18, 1998
Inventors
Annette M. Crevasse
Brian D. Crevasse
William Easter
John A. Maze
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.