Granted Patent
Utility
US 6,082,296 · App. 09/400,933
Thin film deposition chamber
Inventor:
Chuong Van Tran
Patented Case
View Patent ↗
Granted: Jul 4, 2000
Filed: Sep 22, 1999
Inventor
Chuong Van Tran
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.