Granted Patent
Utility
US 6,083,357 · App. 08/791,503
System for and method of providing a controlled deposition on wafers
Inventors:
Robert George Begin, Peter J. Clarke
Patented Case
View Patent ↗
Granted: Jul 4, 2000
Filed: Jan 27, 1997
Inventors
Robert George Begin
Peter J. Clarke
Assignee (at issue)
Applied Science & Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.