Granted Patent
Utility
US 6,083,572 · App. 09/031,865
Organic low-dielectric constant films deposited by plasma enhanced chemical vapor deposition
Inventors:
Jeremy Alfred Theil, Gary W. Ray, Karen L. Seaward, Francoise F. Mertz
Patented Case
View Patent ↗
Granted: Jul 4, 2000
Filed: Feb 27, 1998
Inventors
Jeremy Alfred Theil
Gary W. Ray
Karen L. Seaward
Francoise F. Mertz
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.