Granted Patent
Utility
US 6,083,670 · App. 09/217,280
Process and equipment for rejuvenation treatment of photoresist development waste
Inventors:
Hiroshi Sugawara, Hiromi Henmi
Patented Case
View Patent ↗
Granted: Jul 4, 2000
Filed: Dec 21, 1998
Inventors
Hiroshi Sugawara
Hiromi Henmi
Assignee (at issue)
ORGANO CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.