Granted Patent
Utility
US 6,085,656 · App. 09/122,323
Method of lithographic imaging with reduced debris-generated performance degradation and related constructions
Inventor:
Thomas E. Lewis
Patented Case
View Patent ↗
Granted: Jul 11, 2000
Filed: Jul 24, 1998
Inventor
Thomas E. Lewis
Assignee (at issue)
Presstak, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.