Granted Patent
Utility
US 6,086,699 · App. 09/079,112
Thin film-forming method and thin film-forming apparatus therefor
Inventors:
Akira Nakashima, Atsushi Tonai, Ryo Muraguchi, Michio Komatsu, Katsuyuki Machida, Hakaru Kyuragi, Kazuo Imai
Patented Case
View Patent ↗
Granted: Jul 11, 2000
Filed: May 14, 1998
Inventors
Akira Nakashima
Atsushi Tonai
Ryo Muraguchi
Michio Komatsu
Katsuyuki Machida
Hakaru Kyuragi
Kazuo Imai
Assignees (at issue)
CATALYSTS & CHEMICALS INDUSTRIES CO., LTD.
NIPPON TELEGRAPH AND TELEPHONE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.