Granted Patent
Utility
US 6,087,277 · App. 09/431,137
Window shutter for laser annealing
Inventors:
Chu-Jung Shih, I-Min Lu
Patented Case
View Patent ↗
Granted: Jul 11, 2000
Filed: Nov 1, 1999
Inventors
Chu-Jung Shih
I-Min Lu
Assignee (at issue)
Industrial Technology Research Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.