Granted Patent
Utility
US 6,089,285 · App. 09/069,417
Method and system for supplying semiconductor source material
Inventors:
Mark A. Destefano, James Dean Eoff, Thomas H. Schulte, John M. Anderson, Eng Chin Yau, Donald R. Ruggeri, David W. Baldwin, Charles Lawrence Badino
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Apr 29, 1998
Inventors
Mark A. Destefano
James Dean Eoff
Thomas H. Schulte
John M. Anderson
Eng Chin Yau
Donald R. Ruggeri
David W. Baldwin
Charles Lawrence Badino
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.