Granted Patent
Utility
US 6,089,525 · App. 08/946,457
Six axis active vibration isolation and payload reaction force compensation system
Inventor:
Mark E. Williams
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Oct 7, 1997
Inventor
Mark E. Williams
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.