Granted Patent
Utility
US 6,089,762 · App. 09/062,475
Developing apparatus, developing method and substrate processing apparatus
Inventors:
Masahiro Mimasaka, Koji Uchitani
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Apr 17, 1998
Inventors
Masahiro Mimasaka
Koji Uchitani
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.