Granted Patent
Utility
US 6,090,188 · App. 09/161,980
Air intake apparatus of chemical vapor deposition equipment and method for removing ozone using the same
Inventors:
Chang-jip Yang, Geun-mok Youk, Chong-hyeong Cho, Young-kyou Park
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Sep 29, 1998
Inventors
Chang-jip Yang
Geun-mok Youk
Chong-hyeong Cho
Young-kyou Park
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.