Granted Patent
Utility
US 6,090,522 · App. 09/332,729
Chemical amplification photoresist comprising a reverse reaction inhibitor
Inventor:
Mitsuharu Yamana
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Jun 14, 1999
Inventor
Mitsuharu Yamana
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.