Granted Patent
Utility
US 6,090,634 · App. 09/104,877
Failure analysis apparatus of semiconductor integrated circuits and method thereof
Inventor:
Kinichi Igarashi
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Jun 25, 1998
Inventor
Kinichi Igarashi
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.