Granted Patent
Utility
US 6,090,636 · App. 09/031,961
Integrated circuits using optical waveguide interconnects formed through a semiconductor wafer and methods for forming same
Inventors:
Joseph E. Geusic, Kie Y. Ahn, Leonard Forbes
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Feb 26, 1998
Inventors
Joseph E. Geusic
Kie Y. Ahn
Leonard Forbes
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.