IP Library Granted Patent US 6,090,661
Granted Patent Utility
US 6,090,661 · App. 09/045,633

Formation of novel DRAM cell capacitors by integration of capacitors with isolation trench sidewalls

Inventors: Dung-Ching Perng, Yauh-Ching Liu
Patented Case View Patent ↗
Granted: Jul 18, 2000 Filed: Mar 19, 1998
Inventors
Dung-Ching Perng
Yauh-Ching Liu
Assignee (at issue)
LSI Logic Corporation

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Quick Facts
Patent No.
US 6,090,661
App. No.
09/045,633
Filed
1998-03-19
Granted
2000-07-18
Kind
A