Granted Patent
Utility
US 6,090,712 · App. 08/992,489
Shallow trench isolation formation with no polish stop
Inventors:
Christopher F. Lyons, Basab Bandyopadhyay, Nick Kepler, Olov Karlsson, Larry Wang, Effiong Obok
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Dec 18, 1997
Inventors
Christopher F. Lyons
Basab Bandyopadhyay
Nick Kepler
Olov Karlsson
Larry Wang
Effiong Obok
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.