Granted Patent
Utility
US 6,090,960 · App. 08/779,640
Precursor with (methoxy) (methyl) silylolefin ligand to deposit copper and method same
Inventors:
Yoshihide Senzaki, Lawrence J. Charneski, Masato Kobayashi, Tue Nguyen
Patented Case
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Granted: Jul 18, 2000
Filed: Jan 7, 1997
Inventors
Yoshihide Senzaki
Lawrence J. Charneski
Masato Kobayashi
Tue Nguyen
Assignees (at issue)
Sharp Laboratories of America, Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.