Granted Patent
Utility
US 6,091,056 · App. 08/938,396
Hot plate oven for processing flat panel displays and large wafers
Inventors:
Chak D. Kannan, Adam Weber
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Sep 26, 1997
Inventors
Chak D. Kannan
Adam Weber
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.