Granted Patent
Utility
US 6,091,081 · App. 08/982,585
Insulating film comprising amorphous carbon fluoride, a semiconductor device comprising such an insulating film
Inventors:
Yoshihisa Matsubara, Ko Noguchi, Shinya Ito, Noriaki Oda, Akira Matsumoto, Takashi Ishigami, Masahiko Nakamae, Tadahiko Horiuchi, Kazuhiko Endo, Toru Tatsumi, Yoshishige Matsumoto
Patented Case
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Granted: Jul 18, 2000
Filed: Dec 2, 1997
Inventors
Yoshihisa Matsubara
Ko Noguchi
Shinya Ito
Noriaki Oda
Akira Matsumoto
Takashi Ishigami
Masahiko Nakamae
Tadahiko Horiuchi
Kazuhiko Endo
Toru Tatsumi
Yoshishige Matsumoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.