Granted Patent
Utility
US 6,091,202 · App. 08/743,219
Electron beam exposure apparatus with non-orthogonal electron emitting element matrix
Inventor:
Naoaki Aizaki
Patented Case
View Patent ↗
Granted: Jul 18, 2000
Filed: Nov 5, 1996
Inventor
Naoaki Aizaki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.