IP Library Granted Patent US 6,093,330
Granted Patent Utility
US 6,093,330 · App. 08/867,060

Microfabrication process for enclosed microstructures

Inventors: John Chong, Scott G. Adams, Noel C. MacDonald, Kevin A. Shaw
Patented Case View Patent ↗
Granted: Jul 25, 2000 Filed: Jun 2, 1997
Inventors
John Chong
Scott G. Adams
Noel C. MacDonald
Kevin A. Shaw
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 6,093,330
App. No.
08/867,060
Filed
1997-06-02
Granted
2000-07-25
Kind
A