Granted Patent
Utility
US 6,093,644 · App. 09/104,539
Jig for semiconductor wafers and method for producing the same
Inventors:
Takeshi Inaba, Atsuo Kitazawa
Patented Case
View Patent ↗
Granted: Jul 25, 2000
Filed: Jun 26, 1998
Inventors
Takeshi Inaba
Atsuo Kitazawa
Assignee (at issue)
Toshiba Ceramics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.