Granted Patent
Utility
US 6,094,448 · App. 09/248,466
Grating assembly with bi-directional bandwidth control
Inventors:
Igor V. Fomenkov, Frederick Erie, Alexander I. Ershov
Patented Case
View Patent ↗
Granted: Jul 25, 2000
Filed: Feb 11, 1999
Inventors
Igor V. Fomenkov
Frederick Erie
Alexander I. Ershov
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.