IP Library Granted Patent US 6,094,972
Granted Patent Utility
US 6,094,972 · App. 09/123,146

Sampling scanning probe microscope and sampling method thereof

Inventors: Masatoshi Yasutake, Akira Inoue, Fumiki Sakai, Kazutoshi Watanabe, Tatsuya Miyatani
Patented Case View Patent ↗
Granted: Aug 1, 2000 Filed: Jul 27, 1998
Inventors
Masatoshi Yasutake
Akira Inoue
Fumiki Sakai
Kazutoshi Watanabe
Tatsuya Miyatani
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,094,972
App. No.
09/123,146
Filed
1998-07-27
Granted
2000-08-01
Kind
A