Granted Patent
Utility
US 6,095,085 · App. 09/137,155
Photo-assisted remote plasma apparatus and method
Inventor:
Vishnu K. Agarwal
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Aug 20, 1998
Inventor
Vishnu K. Agarwal
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.