Granted Patent
Utility
US 6,095,175 · App. 09/021,792
Clad piezoelectric valve actuator and application of same in controlling highly reactive and corrosive gases
Inventors:
Charles E. Miller, Louis T. Yoshida, Michael Steinbach
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Feb 11, 1998
Inventors
Charles E. Miller
Louis T. Yoshida
Michael Steinbach
Assignee (at issue)
Engineering Measurements Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.