Granted Patent
Utility
US 6,095,908 · App. 09/338,609
Polishing apparatus having a material for adjusting a surface of a polishing pad and method for adjusting the surface of the polishing pad
Inventor:
Kouzi Torii
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Jun 23, 1999
Inventor
Kouzi Torii
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.