Granted Patent
Utility
US 6,096,571 · App. 09/304,567
Method of improving alignment signal strength by reducing refraction index at interface of materials in semiconductors
Inventors:
Daryl C. New, Thomas M. Graettinger
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: May 4, 1999
Inventors
Daryl C. New
Thomas M. Graettinger
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.