IP Library Granted Patent US 6,096,632
Granted Patent Utility
US 6,096,632 · App. 09/058,141

Fabrication method of semiconductor device using CMP process

Inventor: John M. Drynan
Patented Case View Patent ↗
Granted: Aug 1, 2000 Filed: Apr 10, 1998
Inventor
John M. Drynan
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 6,096,632
App. No.
09/058,141
Filed
1998-04-10
Granted
2000-08-01
Kind
A