Granted Patent
Utility
US 6,096,652 · App. 08/963,438
Method of chemical mechanical planarization using copper coordinating ligands
Inventors:
David Watts, János Farkas, Jason Aquinde GOMEZ, Chelsea Dang
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Nov 3, 1997
Inventors
David Watts
János Farkas
Jason Aquinde GOMEZ
Chelsea Dang
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.