Granted Patent
Utility
US 6,097,992 · App. 08/991,187
Method and controlling system for preventing the scratching of wafer backs by the fetch arm of a stepper machine
Inventors:
Tien-Ya Chen, Chen Tseng
Patented Case
View Patent ↗
Granted: Aug 1, 2000
Filed: Dec 16, 1997
Inventors
Tien-Ya Chen
Chen Tseng
Assignee (at issue)
United Semiconductor Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.