Granted Patent
Utility
US 6,098,641 · App. 08/897,914
Motor drive assembly for a semiconductor wafer processing system
Inventor:
Aleksander Owczarz
Patented Case
View Patent ↗
Granted: Aug 8, 2000
Filed: Jul 21, 1997
Inventor
Aleksander Owczarz
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.